{"created":"2023-06-19T12:44:18.266920+00:00","id":3742,"links":{},"metadata":{"_buckets":{"deposit":"726dfed5-4ce9-42e4-8119-310d49193a4c"},"_deposit":{"created_by":3,"id":"3742","owners":[3],"pid":{"revision_id":0,"type":"depid","value":"3742"},"status":"published"},"_oai":{"id":"oai:tokyo-metro-u.repo.nii.ac.jp:00003742","sets":["1647:623:626"]},"author_link":["11052","11051","11048","11049","11056","11057","11047","11050","11055","11058","11053","11054"],"item_5_alternative_title_19":{"attribute_name":"その他のタイトル","attribute_value_mlt":[{"subitem_alternative_title":"Tribological properties of Micro-Sliding Mechanism Made of Silicon"}]},"item_5_biblio_info_7":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2001-03","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"78","bibliographicPageStart":"1","bibliographic_titles":[{}]}]},"item_5_creator_2":{"attribute_name":"著者(ヨミ)","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"モロヌキ, ノブユキ"}],"nameIdentifiers":[{"nameIdentifier":"11051","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"ウチヤマ, ケンジ"}],"nameIdentifiers":[{"nameIdentifier":"11052","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"カクタ, アキラ"}],"nameIdentifiers":[{"nameIdentifier":"11053","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"フルカワ, ユウジ"}],"nameIdentifiers":[{"nameIdentifier":"11054","nameIdentifierScheme":"WEKO"}]}]},"item_5_creator_3":{"attribute_name":"著者別名","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"Moronuki, Nobuyuki"}],"nameIdentifiers":[{"nameIdentifier":"11055","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Uchiyama, Kenji"}],"nameIdentifiers":[{"nameIdentifier":"11056","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Kakuta, Akira"}],"nameIdentifiers":[{"nameIdentifier":"11057","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Furukawa, Yuji"}],"nameIdentifiers":[{"nameIdentifier":"11058","nameIdentifierScheme":"WEKO"}]}]},"item_5_description_4":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"シリコンの異方性エッチングを用いると微細な規則形状を容易に得ることができる.シリコンはぜい性材料ではあるものの機械的特性に優れるため,微小しゅう動機構等への応用が考えられる.しかし,寸法の微小化に伴ってすべり接触部における表面吸着力が大きくなり,ひいては摩擦力の影響が無視できなくなるため,その低減・制御が必要となっている.そこで本研究では,表面の吸着力特性を実験的に明らかにするとともに,表面に微細規則形状(テクスチャ)を作成することで摩擦係数を低減すること等を検討した. シリコン表面の濡れ性や雰囲気を変えながら表面吸着力の特性を評価した結果,真空環境下では大気環境下よりも表面吸着力が小さくなるとともに,測定される吸着力のばらつきも減少する傾向があることがわかった.吸着力の主な原因は二面間に介在する水分子が架橋(メニスカス)を形成しているためと考えられ,表面の濡れ性を減少させることで表面吸着力を減少させることができることがわかった. また,異方性エッチングによってテクスチャを作成する方法を検討し,その設計指針を明らかにした.基板面方位を適宜選択し,ライン・アンド・スペースのマスクパターンを施してエッチングすることで,対称および非対称V溝が平行して並ぶテクスチャを作成することができる.これをすべり面に適用したとき,接触面圧が小さい場合に見られる動摩擦係数の上昇が大幅に抑制できることがわかった.この効果はテクスチャ面同士,またはテクスチャ面-平面の組合わせによっても同様に得られた.摩擦係数低減の理由は,テクスチャによって真実接触面積が減少したためと考えられる.さらに,テクスチャ面とヤング率の低い材料を組合せたとき,しゅう動方向によって摩擦に変化(方向性)を付与できることがわかった.","subitem_description_type":"Abstract"},{"subitem_description":"Anisotropic etching produces microscopic regular shapes that consist of specific crystal planes. In spite of the brittleness, silicon is considered to suitable for structural material, for example sliding mechanism. However, in the design of micro-mechanism, attraction force between the contact surfaces is critical, because the surface force such as friction becomes dominant comparing with the body forces such as inertia force. Thus, the reduction or control of the friction is necessary. In this study, the properties of adhesion force that acts between silicon surfaces were made clear, and the reduction of friction by applying regular pattern on the contact surfaces, texture, was tried. Surface adhesion force was measured in normal, vacuum, and dry argon gas environments. These results show that the adhesion force decreases in vacuum as well as the deviation in the measurement becomes small. The cause of the effect is considered that the number of meniscus, water bridges between the asperities in contact, decrease in vacuum. It was found that the adsorptive activity of water molecules at the surface increase adhesion force. Applying anisotropic etching with the regular line-and-space mask pattern on the specific substrate, we obtained the surface texture, which means regular and periodic cross-sectional structure on the surface. Typically, symmetric and asymmetric V-grooves were produced with the spacing of 6-micron meter and the depth of sub-micron meter. This structure decreases the adhesion force, and as a results the friction. In addition, the directionality of the friction was observed when the symmetric V-grooves were made in contact with soft materials. In case of papers, the friction in one direction is the twice of the other direction.","subitem_description_type":"Abstract"}]},"item_5_description_5":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"科学研究費補助金研究成果報告書, 課題番号11650135, 1999年度～2000年度, 基盤研究(C)","subitem_description_type":"Other"}]},"item_5_version_type_16":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"諸貫, 信行"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"内山, 賢治"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"角田, 陽"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"古川, 勇二"}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2016-08-04"}],"displaytype":"detail","filename":"10051-001.pdf","filesize":[{"value":"5.6 MB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"10051-001.pdf","url":"https://tokyo-metro-u.repo.nii.ac.jp/record/3742/files/10051-001.pdf"},"version_id":"186cd9b8-8be5-4ffa-85f4-1297e90d6e32"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"research report","resourceuri":"http://purl.org/coar/resource_type/c_18ws"}]},"item_title":"シリコン微小すべり案内機構の接触・摩擦特性評価","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"シリコン微小すべり案内機構の接触・摩擦特性評価"}]},"item_type_id":"5","owner":"3","path":["626"],"pubdate":{"attribute_name":"公開日","attribute_value":"2010-11-29"},"publish_date":"2010-11-29","publish_status":"0","recid":"3742","relation_version_is_last":true,"title":["シリコン微小すべり案内機構の接触・摩擦特性評価"],"weko_creator_id":"3","weko_shared_id":-1},"updated":"2023-06-19T18:09:22.725612+00:00"}